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Multigate device
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41	1 TSMC Property The 450mm Transition Add to Reading List Source URL: www.semi.org Language: English - Date: 2012-10-23 18:11:08 Chemistry TSMC Semiconductors Semiconductor device fabrication Multigate device Wafer Silicon-germanium International Electron Devices Meeting 65 nanometer Electronic engineering Electronics Integrated circuits
42	TSMC, ARM see impressive results with FinFET process Add to Reading List Source URL: phys.org Language: English - Date: 2015-01-15 15:45:45 Technology Computing Electronic engineering TSMC Multigate device ARM architecture
43	Microsoft PowerPoint - Chap1.Slides_Sorteda.ppt Add to Reading List Source URL: media.wiley.com Language: English - Date: 2014-09-08 07:16:02 Electronic engineering Dynamic random-access memory Multigate device Static random-access memory Random-access memory CMOS Integrated circuit MOSFET Very-large-scale integration Computer memory Electronics Computer hardware
44	© IMEC[removed] FEOL ETCH CHALLENGES, FROM PLANAR METAL GATES TOWARDS Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2012-05-24 09:07:30 Microtechnology Extreme ultraviolet lithography Transistors Etching Multigate device IMEC Graphene High-k dielectric Polycrystalline silicon Materials science Technology Physics
45	I Logic Devices and Concepts Nanotechnology. Volume 4: Information Technology II. Edited by Rainer Waser Copyright 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim ISBN: [removed] Add to Reading List Source URL: www.wiley-vch.de Language: English - Date: 2008-09-12 02:22:31 Integrated circuits Silicon Semiconductor devices Transistors MOSFET Silicon-germanium High-k dielectric Multigate device CMOS Electronic engineering Electronics Electrical engineering
46	2-M3D_Leti Day_OFaynot_final Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2014-07-18 02:18:41 Technology Logic families MOSFET Digital electronics Electronic design Multigate device Silicon CMOS Salicide Electronic engineering Electronics Integrated circuits
47	© IMEC[removed] FEOL ETCH CHALLENGES, FROM PLANAR METAL GATES TOWARDS Add to Reading List Source URL: www-leti.cea.fr Language: English - Date: 2012-05-24 09:07:30 Microtechnology Extreme ultraviolet lithography Transistors Etching Multigate device IMEC Graphene High-k dielectric Polycrystalline silicon Materials science Technology Physics
48	NEWS RELEASE For more information, contact: Kristin Steen Public Relations for the IEEE Council on EDA[removed] Add to Reading List Source URL: www.edac.org Language: English - Date: 2013-04-30 04:12:39 Electronic design Chenming Hu Phil Kaufman Award BSIM Multigate device Transistor model IEEE Council on Electronic Design Automation Design Automation Conference Design Automation and Test in Europe Electronic engineering Electrical engineering Electronic design automation
49	1 Table FEP1 Front End Processes Difficult Challenges Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-27 11:42:22 Multigate device 22 nanometer MOSFET
50	1 Table MET1 Difficult Challenges ≥ 12 nm Factory level and company wide metrology integration for real-time in situ, integrated, and inline metrology Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-21 15:43:04 Microtechnology Technology Materials science Nanotechnology Metrology Semiconductor device fabrication Multigate device

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